Process modules for GeSn nanoelectronics with high Sn-contents
نویسندگان
چکیده
منابع مشابه
Defect-free high Sn-content GeSn on insulator grown by rapid melting growth
GeSn is an attractive semiconductor material for Si-based photonics. However, large lattice mismatch between GeSn and Si and the low solubility of Sn in Ge limit its development. In order to obtain high Sn-content GeSn on Si, it is normally grown at low temperature, which would lead to inevitable dislocations. Here, we reported a single-crystal defect-free graded GeSn on insulator (GSOI) stripe...
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ژورنال
عنوان ژورنال: Solid-State Electronics
سال: 2017
ISSN: 0038-1101
DOI: 10.1016/j.sse.2016.10.024